| Vol. 3, No. 1, August 2006- Art. 6 |
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| Control of a Z-Axis MEMS Vibrational Gyroscope |
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by
Roberto Oboe, Member, IEEE, Riccardo Antonello, Student Member,
IEEE, Ernesto Lasalandra, Guido Spinola Durante, and Luciano
Prandi, STMicroelectronics
Copyright
Copyright © IEEE, 2005. Reprinted, with permission,
from Control of a Z-Axis MEMS Vibrational Gyroscope, by Roberto
Oboe, Riccardo Antonello, Ernesto Lasalandra, Guido Spinola
Durante, and Luciano Prandi, IEEE/ASME TRANSACTIONS ON MECHATRONICS,
VOL. 10, NO. 4, AUGUST 2005, pagg. 364-370 - doi 10.1109/TMECH.2005.852437
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Abstract
The paper describes the design of the control loops in a z-axis
MEMS vibrational gyroscope operating in a vacuum enclosure. In
this device, a silicon mass is driven through an electrostatic
actuator so that it has a sinusoidal linear motion with a controlled
speed. The design of a suitable controller capable of maintaining
the required speed and with prescribed restoring capabilities
after shocks is briefly described in the paper. Attached to the
driving mass, a second mass, free to move in the direction orthogonal
to the motion of the first mass, is subjected to a Coriolis force
proportional to the product
of the first mass speed by z-axis rotational speed. The sensing
of the Coriolis force and, in turn, of the z-axis rotational speed,
is performed in closed loop fashion, with a 1-bit quantized actuation.
The restoring force that brings the motion of the second mass
to zero is equivalent to the output bit stream of a band-pass
sigma-delta converter and contains the information of the Coriolis
force. The design of this second control loop and a detailed analysis
on the signal-to-noise ratio achievable.
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