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MEMS: The secret revolution
Today the Semiconductor Industry has reached the astonishing
value of $250 B. And even more surprisingly, it all started
from a simple silicon transistor, which replaced mature
and reliable vacuum tubes thanks to its semiconductor properties.
Lithography has been the driving force of this industry
according to Moore’s Law.
But in the same decades and in the same manufacturing plants
a few pioneers have been exploiting other physical properties
of silicon without following the path of submicron technologies
and 12” wafer fabs. And all those explorers, outside
of the mainstream technology development roadmap highlighted
and supported by the Semiconductor Industry Association,
have faced many theoretical and practical challenges to
bring their ideas to the market. (More...)
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| Vol. 3, No.
1, August 2006 - Table of Contents |
| Art. 1 |
More
than Moore: micro-machined products enable new applications and
open new markets |
by B. Vigna (STMicroelectronics) |
p. 4 |
| Art. 2 |
Out
of plane vs. in plane flexural behaviour of thin polysilicon films:
mechanical characterization and application of the Weibull approach |
by F. Cacchione, A. Corigliano - Politecnico di Milano,
B. De Masi, C. Riva - STMicroelectronics |
p. 15 |
| Art. 3 |
A
capacitance and optical method for the static and dynamic characterization
of MEMS devices |
by Eleonora Ferraris, Irene Fassi, Institute of Industrial
Technology and Automation, Biagio De Masi, STMicroelectronics, Richard
Rosing, Andrew Richardson, Lancaster University |
p. 21 |
| Art. 4 |
Novel
process for realization of multiple axis actuators suitable for
the realization of an optical switch |
by Marco Del Sarto, Simone Sassolini, Mauro Marchi,
Lorenzo Baldo, STMicroelectronics |
p. 29 |
| Art. 5 |
Electrostatic
analysis of a comb-finger actuator with Schwarz–Christoffel
conformal mapping |
by P. Bruschi, A. Nannini, F. Pieri, G. by Raffa,
University of Pisa, B. Vigna, S. Zerbini, STMicroelectronics |
p. 38 |
| Art. 6 |
Control
of a Z-Axis MEMS Vibrational Gyroscope |
by Roberto Oboe, Member, IEEE, Riccardo
Antonello, Student Member, IEEE, Ernesto Lasalandra, Guido Spinola
Durante, and Luciano Prandi, STMicroelectronics |
p. 53 |
| Art. 7 |
Optical
Detection of the Coriolis Force on a Silicon Micromachined Gyroscope |
by Valerio Annovazzi-Lodi, Sabina Merlo, Michele Norgia
- University of Pavia, Guido Spinola, Benedetto Vigna, and Sarah
Zerbini- STMicroelectronics |
p. 63 |
| Art. 8 |
An
Above IC MEMS RF Switch |
by Daniel Saias, Philippe Robert, Samuel Boret, Christophe
Billard, Guillaume Bouche, Didier Belot, and Pascal Ancey, STMicroelectronics |
p. 74 |
| Art. 9 |
A
simple lumped electrical model for an RF MEMS switch considering
lossy substrate effects |
by Giuseppe Cusmai, Marco Mazzini, Paolo Rossi, Francesco
Svelto, University of Pavia; Chantal Combi, Benedetto Vigna, STMicroelectronics |
p. 83 |
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