LIS302ALB
MEMS motion sensor 3-axis - 2g analog output "piccolo" accelerometer
Features
3.0V to 3.6V supply voltage ~2mW power consumption 2g full-scale 3 acceleration channels plus multiplexed analog output Ratiometric output voltage Power down mode Embedded self test 10000g high shock survivability ECOPACK RoHS and "Green" compliant (see Section 6)
LGA-14 (3x5x0.9mm)
The LIS302ALB has a full scale of 2g and it is capable of measuring accelerations over a maximum bandwidth of 2.0kHz. The device bandwidth may be reduced by using external capacitances. A self-test capability allows the user to check the functioning of the sensor in the final application. The device has three analog acceleration output plus an embedded multiplexer that allows to redirect the analog outputs onto a single pin for operation with a single channel A/D converter. The LIS302ALB is available in plastic Thin Land Grid Array package (TLGA) and it is guaranteed to operate over an extended temperature range from -40C to +85C. The LIS302ALB belongs to a family of products suitable for a variety of applications: Mobile terminals Gaming and Virtual Reality input devices Free-fall detection for data protection Antitheft systems and Inertial Navigation Appliance and Robotics.
Description
The LIS302ALB is a miniaturized low-power three-axis linear accelerometer. It includes a sensing element and an IC interface to provide an analog signal to the external world. The sensing element, capable of detecting the acceleration, is manufactured using a dedicated process developed by ST to produce motion sensors and actuators in silicon. The IC interface is manufactured using a CMOS process that allows to design a dedicated circuit which is trimmed to better match the sensing element characteristics. The device can be operated from 2.16V to 3.6V.
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Note:
Order codes
Part number LIS302ALB LIS302ALBTR Temperature range, C -40C to +85C -40C to +85C Package LGA-14 LGA-14 Packing Tray Tape & reel
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Tape & reel parts are compliant to International Standard EIA-481.
October 2006
Rev 1
1/17
www.st.com 17
Contents
LIS302ALB
Contents
1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Pin description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2
Mechanical and electrical specifications . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 2.2 2.3 2.4 Mechanical characteristics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Absolute maximum ratings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
3
Functionality . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3.1 3.2 3.3 Sensing element . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 IC interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 Factor y calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
4
Application hints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
4.1 4.2 Soldering information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11 Output response vs. orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
5
Typical performance characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
5.1 5.2 5.3 Mechanical characteristics at 25C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12 Mechanical characteristics derived from measurement in the -40C to +85C temperature range 13
6
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Package information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 Revision history . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
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Electrical characteristics at 25C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
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LIS302ALB
Block diagram
1
Block diagram
Figure 1. Block diagram
X+ Y+ Z+
CHARGE AMPLIFIER S/H
Routx
Voutx
a
ZYX-
MUX
DEMUX
Routy S/H
Vouty
Routz S/H
Voutz Vout
SELF TEST
REFERENCE
TRIMMING CIRCUIT
CLOCK
1.1
Pin description
Figure 2. Pin connection
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MUX
13
res
1
Vdd Aux_in Vout GND Voutz Vouty
8
res res S0 S1 ST PD
6
LIS302AL
Voutx
(TOP VIEW) DIRECTION OF THE DETECTABLE ACCELERATIONS
(BOTTOM VIEW)
3/17
Block diagram Table 1.
Pin # 1 2 3 4 5 6 7 8 9 10 11 12 13 14
LIS302ALB Pin description
Pin Name Reserved Reserved S0 S1 ST PD Voutx Vouty Voutz GND Vout Aux_In Vdd Reserved Connect to Vdd Connect to Vdd Mux selector 0 (Connect to Vdd or to GND) Mux selector 1 (Connect to Vdd or to GND) Self Test (Logic 0: normal mode; Logic 1: Self-test) Power Down (Logic 0: normal mode; Logic 1: Power-Down mode) Output Voltage X channel Output Voltage Y channel Output Voltage Z channel 0V supply Multiplexer output Auxiliar y input Power supply Connect to Vdd Function
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LIS302ALB
Mechanical and electrical specifications
2
2.1
Table 2.
Symbol Ar So SoDr Voff OffDr NL
Mechanical and electrical specifications
Mechanical characteristics.
Mechanical characteristics(1) All parameters are specified @ Vdd =3.3V, T = 25C unless otherwise noted
Parameter Acceleration range(3) Sensitivity(4) Sensitivity change Vs Temperature Zero-g level(4) Zero-g level change Vs Temperature Non Linearity(5)
(6)
Test Condition
Min.
Typ.(2) 2.0
Max.
Unit g
0.145*Vdd 5% Delta from +25C T = 25C Delta from +25C Best fit straight line Vdd/2-6%
0.145*Vdd 0.01 Vdd/2 0.5 0.5 2
0.145*Vdd + 5%
V/g %/C
Vdd/2+6%
V mg/C % FS %
CrossAx Cross-Axis An
Acceleration Noise Density
Vdd=3.3V T = 25C Vdd=3.3V X axis
+95
Vt
Self test output voltage change(7),(8)
T = 25C Vdd=3.3V Y axis T = 25C Vdd=3.3V Z axis
Fres
Sensing Element Resonant Frequency(9)
Top Wh
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1. The product is factory calibrated at 3.3V. The operational power supply range is specified in table 3. Since the device is ratiometric Voff, So and Vt parameters will vary with supply voltage.
2. Typical specifications are not guaranteed 3. Guaranteed by wafer level test and measurement of initial offset and sensitivity 4. Zero-g level and sensitivity are ratiometric to supply voltage 5. Guaranteed by design 6. Contribution to the measuring output of an inclination/acceleration along any perpendicular axis 7. Self test output voltage change" is defined as Vout(Vst=Logic1)-Vout(Vst=Logic0) 8. Self test output voltage change" varies cubically with supply voltage 9. Minimum resonance frequency Fres=2.0kHz. Sensor bandwidth=1/(2**32k*Cload)
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Operating Temperature Range Product Weight
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200
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g/
Hz
+200
mV
+200
mV
+200
mV
kHz
+85 30
C mgram
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Mechanical and electrical specifications
LIS302ALB
2.2
Table 3.
Symbol Vdd Idd
Electrical characteristics
Electrical characteristics(1) All parameters are specified @ Vdd =3.3V, T=25C unless otherwise noted
Parameter Supply Voltage Supply Current Supply Current in Power Down Mode Self Test Input Logic 1 level at Vdd=3.3V Rout Output impedance of Voutx, Vouty, Voutz Capacitive Load Drive for Voutx, Vouty, Voutz(3) Logic 0 level at Vdd=3.3V Vs0 S0 Input Logic 1 level at Vdd=3.3V Logic 0 level at Vdd=3.3V Vs1 S1 input Logic 1 level at Vdd=3.3V Series resistance of multiplexer input Vs Vout Capacitive load drive for multiplexed output Vout Turn-On Time at exit from Power Down mode Operating Temperature Range 2.0 0 2.5 0 2.0 32 Vdd V k mean value PD pin connected to GND PD pin connected to Vdd Logic 0 level at Vdd=3.3V Vst 0 Test Condition Min. 3.0 Typ.(2) 3.3 0.65 Max. 3.6 Unit V mA
IddPdn
1 0.8
A V
Cload
2.0
Rmux
Cloadmux
Ton
Top
1. The product is factory calibrated at 3.3V. For availability of different supply voltage in the maximum range [2.16V, 3.6V] contact factory 2. Typical specifications are not guaranteed
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3. Minimum resonance frequency Fres=2.0kHz. Device bandwidth=1/(2**32k*Cload)
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0.8 Vdd 0.8 Vdd
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nF V V V V k
pF
160*Cload+0.3
ms
-40
+85
C
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LIS302ALB
Mechanical and electrical specifications
2.3
Absolute maximum ratings
Stresses above those listed as "absolute maximum ratings" may cause permanent damage to the device. This is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to maximum rating conditions for extended periods may affect device reliability. Table 4.
Symbol Vdd Vin VAux_in APOW Supply voltage Input Voltage on Any Control pin (PD, ST) Aux_in Input Voltage Acceleration (Any axis, Powered, Vdd=3.3V) 10000g for 0.1 ms 3000g for 0.5 ms AUNP TSTG Acceleration (Any axis, Not powered) 10000g for 0.1 ms Storage Temperature Range -40 to +150 2 (HBM) ESD Electrostatic Discharge Protection
Absolute maximum ratings
Ratings Maximum Value -0.3 to 6 -0.3 to Vdd +0.3 -0.3 to Vdd +0.3 3000g for 0.5 ms Unit V V V
This is a Mechanical Shock sensitive device, improper handling can cause permanent damages to the part This is an ESD sensitive device, improper handling can cause permanent damages to the part
2.4
Terminology
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Sensitivity describes the gain of the sensor and can be determined by applying 1g acceleration to it. As the sensor can measure DC accelerations this can be done easily by pointing the axis of interest towards the center of the earth, note the output value, rotate the sensor by 180 degrees (point to the sky) and note the output value again thus applying 1g acceleration to the sensor. Subtracting the larger output value from the smaller one and dividing the result by 2 will give the actual sensitivity of the sensor. This value changes very little over temperature (see sensitivity change vs. temperature) and also very little over time. The Sensitivity Tolerance describes the range of Sensitivities of a large population of sensors.
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C KV KV V
Zero-g level describes the actual output signal if there is no acceleration present. A sensor in a steady state on a horizontal surface will measure 0g in X axis and 0g in Y axis whereas the Z axis will measure +1g. The output is ideally for a 3.3V powered sensor Vdd/2 = 1650mV. A deviation from ideal 0-g level (1650mV in this case) is called Zero-g offset. Offset of precise MEMS sensors is to some extend a result of stress to the sensor and therefore the offset can slightly change after mounting the sensor onto a printed circuit board or exposing it to extensive mechanical stress. Offset changes little over temperature - see "Zero-g level change vs. temperature" - the Zero-g level of an individual sensor is very stable
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Mechanical and electrical specifications
LIS302ALB
over lifetime. The Zero-g level tolerance describes the range of Zero-g levels of a population of sensors. Self Test allows to check the sensor functionality without moving it. The Self Test function is off when the ST pin is connected to GND. When the ST pin is tied at Vdd an actuation force is applied to the sensor, simulating a definite input acceleration. In this case the sensor outputs will exhibit a voltage change in their DC levels which is related to the selected full scale and depending on the Supply Voltage through the device sensitivity. When ST is activated, the device output level is given by the algebraic sum of the signals produced by the acceleration acting on the sensor and by the electrostatic test-force. If the output signals change within the amplitude specified inside Table 2, than the sensor is working properly and the parameters of the interface chip are within the defined specification. Output impedance describes the resistor inside the output stage of each channel. This resistor is part of a filter consisting of an external capacitor of at least 2.5nF and the internal resistor. Due to the resistor level, only small inexpensive external capacitors are needed to generate low corner frequencies. When interfacing with an ADC it is important to use high input impedance input circuitries to avoid measurement errors. Note that the minimum load capacitance forms a corner frequency close to the resonance frequency of the sensor. In general the smallest possible bandwidth for a particular application should be chosen to get the best results.
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LIS302ALB
Functionality
3
Functionality
The LIS302ALB is an "piccolo" low-power, analog output three-axis linear accelerometer packaged in a LGA package. The complete device includes a sensing element and an IC interface able to take the information from the sensing element and to provide an analog signal to the external world. The sensor provides the three accelerations and one multiplexed analog output.
3.1
Sensing element
A proprietary process is used to create a surface micro-machined accelerometer. The technology allows to carry out suspended silicon structures which are attached to the substrate in a few points called anchors and are free to move in the direction of the sensed acceleration. To be compatible with the traditional packaging techniques a cap is placed on top of the sensing element to avoid blocking the moving parts during the moulding phase of the plastic encapsulation. When an acceleration is applied to the sensor the proof mass displaces from its nominal position, causing an imbalance in the capacitive half-bridge. This imbalance is measured using charge integration in response to a voltage pulse applied to the sense capacitor. At steady state the nominal value of the capacitors are few pF and when an acceleration is applied the maximum variation of the capacitive load is in fF range.
3.2
IC interface
The complete signal processing uses a fully differential structure, while the final stage converts the differential signal into a single-ended one to be compatible with the external world. The first stage is a low-noise capacitive amplifier that implements a Correlated Double Sampling (CDS) at its output to cancel the offset and the 1/f noise. The produced signal is then sent to three different S&Hs, one for each channel, and made available to the outside. The device provides an embedded multiplexer to allow the redirection of either the analog output signals Voutx, Vouty, and Voutz or of an auxiliary input signal onto a single pin for operation with a single channel A/D converter. All the analog parameters (output offset voltage and sensitivity) are ratiometric to the voltage supply. Increasing or decreasing the voltage supply, the sensitivity and the offset will increase or decrease linearly. The feature provides the cancellation of the error related to the voltage supply along an analog to digital conversion chain. The product is factory calibrated at 3.3V. For availability of different supply voltage in the maximum range [2.16V, 3.6V] contact factory
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Factory calibration
The IC interface is factory calibrated for sensitivity (So) and Zero-g level (Voff). The trimming values are stored inside the device in a non volatile structure. Any time the device is turned on, the trimming parameters are downloaded into the registers to be employed during the normal operation. This allows the user to employ the device without further calibration.
9/17
Application hints
LIS302ALB
4
Application hints
Figure 3. LIS302ALB electrical Connection LIS302ALB (top view)
Vdd GND GND 10F
Vdd
Z X 1
Pin 1 indicator
1
13
100nF
LIS302AL
6 8
Digital signals
Aux In Vout
S0 S1 ST PD
Y
GND Optional Vout z Cload z
DIRECTION OF THE DETECTABLE ACCELERATIONS
Optional Vout Y Cload y Optional Cload x
Power supply decoupling capacitors (100nF ceramic or polyester + 10F Aluminum) should be placed as near as possible to the device (common design practice). The LIS302ALB allows to band limit Voutx, Vouty and Voutz through the use of external capacitors. The recommended frequency range spans from DC up to 2.0kHz. Capacitors must be added at output pins to implement low-pass filtering for antialiasing and noise reduction. The equation for the cut-off frequency (ft) of the external filters is:
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Taking into account that the internal filtering resistor (Rout) has a nominal value equal to 32k, the equation for the external filter cut-off frequency may be simplified as follows: 5F f t = ---------------------------------- [ H z ] C l o a d ( x, y, z )
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1 f t = --------------------------------------------------------------2 R o u t C l o a d ( x, y, z )
The tolerance of the internal resistor can vary typically of 20% within its nominal value of 32k; thus the cut-off frequency will vary accordingly. A minimum capacitance of 2.5nF for Cload(x, y, z) is required in any case. An external capacitor can be added to the Vout pin. Values below 10 pF are recommended.
10/17
LIS302ALB Table 5. Filter capacitor selection, Cload (x,y,z)
Cut-off frequency 1 Hz 10 Hz 20 Hz 50 Hz 100 Hz 200 Hz 500 Hz
Application hints
Capacitor value 5 F 0.5F 250nF 100nF 50nF 25nF 10nF
Table 6.
MUX I/O table
S1 pin 0 0 1 1 S0 pin 0 1 0 1 MUX status Vout=Vout X Vout=Vout Y Vout=Vout Z
Vout=Aux_in
4.1
Soldering information
The LGA package is compliant with the ECOPACK, RoHs and "Green" standard.It is qualified for soldering heat resistance according to JEDEC J-STD-020C. Pin1 indicator is electrically connected to pin 1. Leave pin 1 indicator unconnected during soldering. Land pattern and soldering recommendations are available at www.st.com/mems.
4.2
Output response vs. orientation
Figure 4.
Output Response vs. Orientation
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X=1.17V (-1g) Y=1.65V (0g) Z=1.65V (0g)
Bottom
TOP VIEW X=1.65V (0g) Y=1.17V (-1g) Z=1.65V (0g)
X=1.65V (0g) Y=2.13V (+1g) Z=1.65V (0g)
Top Top
X=1.65V (0g) Y=1.65V (0g) Z=1.17V (-1g)
X=1.65V (0g) Y=1.65V (0g) Bottom Z=2.13V (+1g)
X=2.13V (+1g) Y=1.65V (0g) Z=1.65V (0g)
Earth's Surface
Figure 4 refers to LIS302ALB powered at 3.3V.
11/17
Typical performance characteristics
LIS302ALB
5
5.1
Typical performance characteristics
Mechanical characteristics at 25C
Figure 5.
30
X-axis Zero-g level and Sensitivity at 3.3V
15
25
Percent of parts (%)
20
Percent of parts (%)
10
15
10
5
5
0 1.55
1.6
1.65 Zero g level (V)
1.7
1.75
0
0.44
0.46
0.48 Sensitivity(V/g)
Figure 6.
30
Y-axis Zero-g level and Sensitivity at 3.3V
15
25
Percent of parts (%)
Percent of parts (%)
20
15
10
5
0 1.55
1.6
Figure 7.
Percent of parts (%)
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25 20 15 10 5 0 1.55
Percent of parts (%)
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0.52
1.7
1.75
0
0.44
0.46
0.48 Sensitivity(V/g)
0.5
0.52
Z-axis Zero-g leveland Sensitivity at 3.3V
20 18 16 14 12 10 8 6 4 2 1.6 1.65 Zero g level (V) 1.7 1.75 0 0.44 0.46 0.48 Sensitivity(V/g) 0.5 0.52
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LIS302ALB
Typical performance characteristics
5.2
Mechanical characteristics derived from measurement in the -40C to +85C temperature range
Figure 8.
35 30
40
X-axis Zero-g level and Sensitivity change Vs temperature
50 45
Percent of parts (%)
Percent of parts (%)
25 20 15 10 5 0 2.5
35 30 25 20 15 10 5
2.0
1.5
1.0 0.5 0 0.5 1.0 1.5 Zero g level change (mg/deg.C)
2.0
2.5
0 0.04
0.03 0.02 0.01 0 0.01 0.02 0.03 Sensitivity Change(%/deg. C), 40/+85 Deg.C
Figure 9.
35 30 25 20 15 10 5 0 2.5
Y-axis Zero-g level and Sensitivity change Vs temperature
45 40 35
Percent of parts (%)
Percent of parts (%)
30 25 20 15 10
2
1.5
1 0.5 0 0.5 1 1.5 Zero g level change (mg/deg.C)
Figure 10. Z-axis Zero-g level and Sensitivity change Vs temperature
30
45 40 35
Percent of parts (%)
Percent of parts (%)
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0.04
2.0
2.5
0 0.04
0.03 0.02 0.01 0 0.01 0.02 0.03 Sensitivity Change (%/deg. C), 40/+85 Deg.C
0.04
30 25 20 15 10
15
10
5
5
0 2.5
2.0
1.5
1.0 0.5 0 0.5 1.0 1.5 Zero g level change (mg/deg.C)
2.0
2.5
0 0.04
0.03 0.02 0.01 0 0.01 0.02 0.03 Sensitivity Change (%/deg. C), 40/+85 Deg.C
0.04
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Typical performance characteristics
LIS302ALB
5.3
Electrical characteristics at 25C
Figure 11. Current consumption at 3.3V
40 35 30
Percent of parts (%)
25 20 15 10 5 0 0.2
0.3
0.4
0.5 0.6 0.7 0.8 current consumption (mA)
0.9
1
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LIS302ALB
Package information
6
Package information
In order to meet environmental requirements, ST offers these devices in ECOPACK packages. These packages have a Lead-free second level interconnect. The category of second Level Interconnect is marked on the package and on the inner box label, in compliance with JEDEC Standard JESD97. The maximum ratings related to soldering conditions are also marked on the inner box label. ECOPACK is an ST trademark. ECOPACK specifications are available at: www.st.com. Figure 12. LGA 14: Mechanical Data & Package Dimensions
mm DIM. MIN. A1 A2 A3 D1 E1 e d L1 N N1 P1 P2 T1 T2 R h k i s 0.965 0.640 0.750 0.450 1.200 0.150 0.050 0.100 0.100 0.180 2.850 4.850 0.220 3.000 5.000 0.800 0.300 4.000 1.360 1.200 0.975 0.650 0.800 0.500 TYP. 0.920 M AX . 1.000 0.700 MIN. TYP. MAX. 0.0362 0.0394 0.0275 inch
OUTLINE AND MECHANICAL DATA
0.260 0.0071 0.0087 0.0102 3.150 0.1122 0.1181 0.1240 5.150 0.1909 0.1968 0.2027 0.0315 0.0118 0.1575 0.0535 0.0472 0.985 0.0380 0.0384 0.0386 0.660 0.0252 0.0256 0.0260 0.850 0.0295 0.0315 0.0335 0.550 0.0177 0.0197 0.0217 1.600 0.0472
0.0059 0.0020 0.0039 0.0039
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LGA14 (3x5x0.92mm) Pitch 0.8mm Land Grid Array Package
7773587 C
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Revision history
LIS302ALB
7
Revision history
Table 7.
Date 03-Oct-2006
Document revision history
Revision 1 Initial release. Changes
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LIS302ALB
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