Micro-electro-mechanical systems (MEMS) technology is one of the most exciting areas in the field of “analog” technology.
Sensitive, compact and inexpensive inertial sensors based on MEMS technology allow system designers to add new capabilities to their products that make them easier to use, more functional and more reliable.
For example, in an Internet-enabled mobile phone or PDA, motion-sensing devices can be used to enable an intuitive user interface based on simple movements of the hand. In home appliances a vibration sensor chip can detect fault conditions and alert the user to the need for preventive maintenance before a failure occurs or even before a problem becomes perceptible.
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Commercially available inertial MEMS sensors include different types that can sense movement in one, two, or even three linear axis.
Some types also directly sense rotational acceleration around one axis and others, gyroscopes, can implement the function of a Coriolis-effect, sensing the angolar rate. These sensors share the same principle of operation and sense movements by measuring changes in capacitance between moving and fixed structures.
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