MEMS (Micro Electro Mechanical Systems) is an exciting
technology that exploits the mechanical properties of silicon to integrate
mechanical structures sensitive to vibration, displacement, acceleration, and
rotation. This technology has opened the door to a new generation of compact,
cost effective, high-precision sensors. While conventional microelectronics
development have focused on incremental improvements on well-established
electronics technologies, MEMS compel designers to think three-dimensionally
and to acquire a unique blend of multi-disciplinary skills combining
electrical, semiconductor, and mechanical design.
MEMS are manufactured via a micromachining process that shares processing
steps similar to and derived from basic integrated circuit techniques. Rather
than simply producing an electrical circuit, however, the end result is
typically an electrical circuit along with a 3-dimensional mechanical
structure, most often on a silicon substrate. Automotive, industrial, consumer,
telecommunication, and medical markets are taking great advantage of MEMS
technology. The technology can add substantial new capabilities to applications
and products, making them easier to use, more functional, more reliable, and
more affordable. Common application of MEMS technology today, is found in
airbag sensors and ink-jet printer heads.
The editors of the ST Journal of Research have collected nine
technical papers addressing a wide spectrum of issues and solutions in MEMS.
Among the topics covered in this issue are: mechanical characterization of MEMS
devices, new process technologies for MEMS, MEMS optical switches, MEMS
gyroscopes, and RF MEMS.
“A broad range of applications in a wide range of markets are adopting
micro-machined products as ST, and others, expand their technology portfolio
and manufacture more efficiently,” said Benedetto Vigna, Director, MEMS
Business Unit, STMicroelectronics. “Expansion into new markets requires MEMS
pioneers to adopt a new mindset and to challenge themselves with visionary
solutions, adopting new technology solutions. The ST Journal of Research
is an excellent vehicle from which to share some key issues and solutions with
the research community.”
The ST Journal of Research aims to facilitate knowledge sharing and
exchange on key research issues, methodologies, and solutions. ST publishes its
journal in electronic format and is available at http://www.st.com/stonline/press/magazine/stjournal/index.htm.
